(2013E12E24)
  nvo HILTEX bxWaNzv
 
 
 
(2013E12E24)
  ߫nvFB
 
 
 
 
DCHT-500 tCl 
  • Duracraft tC
  • ߩΤ[ҥi]p
  • ꦡj]p(Self-Locking Spacers) - ঳קKuܫU(Sagging)
  • u@߱ĥίM(APM), ѳ̰ܷůO
  • ̰s{ūץi 1300℃
  • Aλs{: Well drive, ϰ, LOCOS, h, ΨLŻs{
 
 

 
AD-13019DCHT500 
 OEM: BTU
 Lead time(wks):6 
 

 
Wafermap n 
  • on - i,s,R,εıƦUb鴹WqұoѼ
  • iqU׶q (metrology) Ѽ (Ҧp: ellipsometers , thickness gauges , 4 point  probes) Jܦn
  • JѼƫ,niNı, Ψϥ line scans, contour plots , 2D , 3D plots,   histogram 覡ӧe{
 
 

 
Triple Loop Chiller 
  • Not
  • ĥ R407C ON
  • ūײ`۰ĵܨt
  • 3 ئ۰ʴ`ިt (Triple Loop System)
 
 

 
洹Bz 
  • AΩhػs{]t: ۶(coating), ۬~(rinsing), α۰(drying), æSBzk(etching), ....Χhs{
  • tS-MݤWkG (Etching) s{
  • t׻~tȥib 0.1 rpm dH
  • ĥΦAF(Servo Motor); ǫ
  • QLiܬ۰ʩΤʼQ`覡
  • iBzhز~: (12T), (die), n(mask),  Ӷq(solar cell), ΦhعǬ...
  • ĥΰܻGkʧ:  ѵMEm (NPP - Natural Polypropylene) Kts (PTFT - Teflon), ϥΧeM~קKV